KINEMATICS MODELING OF MAGNETIC AND ABRASIVE SILICON WAFER POLISHING

R. V. Fedortsev; N. S. Khomich; A. I. Lougovik; A. E. Korzun; P. V. Kukhto

For citations:

Fedortsev R.V., Khomich N.S., Lougovik A.I., Korzun A.E., Kukhto P.V. KINEMATICS MODELING OF MAGNETIC AND ABRASIVE SILICON WAFER POLISHING. Science & Technique. 2009;(1):32-38. (In Russ.)

This work is licensed under a Creative Commons Attribution 4.0 License.

ISSN 2227-1031 (Print)
ISSN 2414-0392 (Online)

Username
Password
	Remember me
Not a user? Register with this site Forgot your password?

User

Science & Technique

For citations:

Cookies policy