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For citations:

Dainiak I.V., Karpovich S.E., Kekish N.I., Goldyn L. PRECISION MOTION SYSTEM FOR OPTO-MECHANICAL EQUIPMENT OF MICROELECTRONICS. Science & Technique. 2015;(4):24-32. (In Russ.)



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ISSN 2227-1031 (Print)
ISSN 2414-0392 (Online)

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