METHODS FOR OBTAINING SUB-PIXEL RESOLUTION DURING AUTOMATIC INSPECTION OF PATTERN MASTER MASKS OF INTEGRATED CIRCUITS

S. M. Avakov

Science & Technique
Nauka i tehnika

ISSN 2227-1031 (Print)
ISSN 2414-0392 (Online)

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Avakov S.M. METHODS FOR OBTAINING SUB-PIXEL RESOLUTION DURING AUTOMATIC INSPECTION OF PATTERN MASTER MASKS OF INTEGRATED CIRCUITS. Science & Technique. 2008;(1):44-49. (In Russ.)

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ISSN 2227-1031 (Print)
ISSN 2414-0392 (Online)

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