MANUFACTURING TECHNOLOGY OF PHOTOGRAPHIC MASKS BASED ON REAL-TIME SIMULATION OF PARAMETRIZED PHOTOLITHOGRAPHY PROCESS

V. A. Rusetski

Science & Technique
Nauka i tehnika

ISSN 2227-1031 (Print)
ISSN 2414-0392 (Online)

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Rusetski V.A. MANUFACTURING TECHNOLOGY OF PHOTOGRAPHIC MASKS BASED ON REAL-TIME SIMULATION OF PARAMETRIZED PHOTOLITHOGRAPHY PROCESS. Science & Technique. 2013;(4):43-48. (In Russ.)

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ISSN 2227-1031 (Print)
ISSN 2414-0392 (Online)

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